Category Archives: Publications
Micromachined Frequency-output Force Probes
M. Mahdavi, A. Abbasalipour, A. Ramezany and S. Pourkamali, “Micromachined Frequency-output Force Probes,” IEEE Sensor Journals,Volume 16, Issue 14, pp5520-5521, May 2016.
Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography
V. Kumar, E. Mehdizadeh, S. Pourkamali, “Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography”, IEEE Transactions on NanoTechnology, Vol 15, Issue 3, pp. 457-464.
Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer
V. Kumar, R. Jafari, S. Pourkamali, “Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer”, Accepted for Publication, IEEE Sensors Journal, May 2016.
Nanoelectromechanical resonant narrow-band amplifiers
Alireza Ramezany, Mohammad Mahdavi & Siavash Pourkamali, “Nanoelectromechanical resonant narrow-band amplifiers”, Microsystems & Nanoengineering 2, Article number: 16004 (2016).
Ultra-Low Power Self-Computing Binary Output Digital MEMS Accelerometer
V. Kumar, X. Guo, R. Jafari, S. Pourkamali, IEEE MEMS 2016.
Single-Mask Field Emission Based Tunable MEMS Tunneling Accelerometer
V. Kumar, X. Guo, S. Pourkamali, “Single-Mask Field Emission Based Tunable MEMS Tunneling Accelerometer”, IEEE Nano, 2015.
Enhanced Parallel Scanning Probe Nanolithography through Electrically Decoupled 2D MEMS Thermal Actuators
V. Kumar, E. Mehdizadeh, S. Pourkamali, “Enhanced Parallel Scanning Probe Nanolithography through Electrically Decoupled 2D MEMS Thermal Actuators”, IEEE Nano 2015.
Sail-Shaped Piezoelectric Micro-resonators for high resolution gas flowmetry
A. Ramezany, M.Mahdavi, A. Moses, S. Pourkamali, “Sail-Shaped Piezoelectric Micro-resonators for high resolution gas flowmetry”, IEEE Transducers 2015.
Ultra Sensitive Lorentz Force MEMS Magnetometer with Pico-Tesla Limit of Detection
V. Kumar, M. Mahdavi, X. Guo, E. Mehdizadeh and S. Pourkamali, “Ultra Sensitive Lorentz Force MEMS Magnetometer with Pico-Tesla Limit of Detection”,To be presented at IEEE MEMS 2015.
Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations
M. Maldonado Garcia, E. Mehdizadeh, V. Kumar, J.C Wilson and S. Pourkamali, “Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations”, To be presented at IEEE MEMS 2015.