Thin Film Piezoelectric-on-Silicon Elliptical Resonators with Low Liquid Phase Motional Resistances

M. Mahdavi, A. Abbasalipour, and S. Pourkamali, “Thin Film Piezoelectric-on-Silicon Elliptical Resonators with Low Liquid Phase Motional Resistances,” IEEE Sensors Journal, vol. 19, no. 1, pp. 113–120, Jan. 2019.