S. Pourkamali, Z. Hao and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part II: implementation and characterization,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1054–1062, December. 2004.

S. Pourkamali, et al, “High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps,” Journal of Micro Electro Mechanical Systems, vol. 12, no. 4, pp. 487–496, August 2003.