S. Pourkamali, et al, “High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps,” Journal of Micro Electro Mechanical Systems, vol. 12, no. 4, pp. 487–496, August 2003. 
S. Pourkamali, et al, “High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps,” Journal of Micro Electro Mechanical Systems, vol. 12, no. 4, pp. 487–496, August 2003.