A. Hajjam, A. Rahafrooz, J. C. Wilson, and S. Pourkamali, “Thermally actuated MEMS resonant sensors for mass measurement of micro/nanoscale aerosol particles,” proceedings, IEEE Sensors Conference, 2009, pp. 707-710.
A. Hajjam, A. Rahafrooz, J. C. Wilson, and S. Pourkamali, “Thermally actuated MEMS resonant sensors for mass measurement of micro/nanoscale aerosol particles,” proceedings, IEEE Sensors Conference, 2009, pp. 707-710.