Surface Area Enhancement of Nanomechanical Disk Resonators Using MWCNT for Mass Sensing Applications
V. Qaradaghi, B. Dousti, Y. Choi, G. S. Lee, W. Hu, and S. Pourkamali, “Surface Area Enhancement of Nanomechanical Disk Resonators Using MWCNT for Mass Sensing Applications,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 66, Issue 3, March
Thin Film Piezoelectric-on-Silicon Elliptical Resonators with Low Liquid Phase Motional Resistances
M. Mahdavi, A. Abbasalipour, and S. Pourkamali, “Thin Film Piezoelectric-on-Silicon Elliptical Resonators with Low Liquid Phase Motional Resistances,” IEEE Sensors Journal, vol. 19, no. 1, pp. 113–120, Jan. 2019.
Nanomechanical Disk Resonators as Highly Sensitive Mass Sensors
V. Qaradaghi, A. Ramezany, S. Babu, and S. Pourkamali, “Nanomechanical Disk Resonators as Highly Sensitive Mass Sensors”, IEEE Electron Device Letters (EDL), Vol. 39, Issue 11, Nov. 2018.
Micro-Resonator-on-Membrane for Real-Time Mass Detection in Liquid Phase
M. Mahdavi and S. Pourkamali, “Micro-Resonator-on-Membrane for Real-Time Mass Detection in Liquid Phase,” IEEE Sensors Letters, vol. 2, no. 3, pp. 1–4, Sep. 2018.
Piezoelectric MEMS Resonant Dew Point Meters
M. Mahdavi, E. Mehdizadeh, and S. Pourkamali, “Piezoelectric MEMS Resonant Dew Point Meters,” Sens. Actuators Phys., Vol. 276, June 2018, pp. 52-61.
Ultra-High Frequency Nanomechanical Piezoresistive Amplifiers for Direct Channel-Selective Receiver Front-Ends
A. Ramezany and S. Pourkamali, “Ultra-High Frequency Nanomechanical Piezoresistive Amplifiers for Direct Channel-Selective Receiver Front-Ends”, Nano Letters, 2018, 18 (4), pp 2551–2556.
Sensitivity Enhancement of a Lorentz Force MEMS Magnetometer with Frequency Modulated Output
V. Kumar, S. Sebdani, S. Pourkamali, “Sensitivity Enhancement of a Lorentz Force MEMS Magnetometer with Frequency Modulated Output”, Journal of Microelectromechanical Systems, Vol 26, Issue 4, pp 870-878, Aug 2017.
Inertial Impaction on MEMS Balance Chips for Real-Time Air Quality Monitoring
E. Mehdizadeh, V. Kumar, J. Wilson, S. Pourkamali, “Inertial Impaction on MEMS Balance Chips for Real-Time Air Quality Monitoring”, IEEE Sensors Journal, Vol. 17, Issue 8, pp 2329-2337, April 2017.
Chip-scale implementation and Cascade Assembly of particulate matter Collectors with embedded resonant mass balances
M. Maldonado -Garcia, V. Kumar, J.C. Wilson, and S. Pourkamali, “Chip-scale implementation and Cascade Assembly of particulate matter Collectors with embedded resonant mass balances”, Accepted for Publication, IEEE Sensors Journal, November 2016.
Amplitude Modulated Lorentz Force MEMS Magnetometer with Pico-tesla sensitivity
V. Kumar, A. Ramezany, M. Mahdavi, S. Pourkamali, “Amplitude Modulated Lorentz Force MEMS Magnetometer with Pico-tesla sensitivity”, Journal of Micromechanics and Microengineering, Volume 26, Number 10, 105021, September 2016.
Micromachined Frequency-output Force Probes
M. Mahdavi, A. Abbasalipour, A. Ramezany and S. Pourkamali, “Micromachined Frequency-output Force Probes,” IEEE Sensor Journals,Volume 16, Issue 14, pp5520-5521, May 2016.
Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography
V. Kumar, E. Mehdizadeh, S. Pourkamali, “Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography”, IEEE Transactions on NanoTechnology, Vol 15, Issue 3, pp. 457-464.
Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer
V. Kumar, R. Jafari, S. Pourkamali, “Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer”, Accepted for Publication, IEEE Sensors Journal, May 2016.
Nanoelectromechanical resonant narrow-band amplifiers
Alireza Ramezany, Mohammad Mahdavi & Siavash Pourkamali, “Nanoelectromechanical resonant narrow-band amplifiers”, Microsystems & Nanoengineering 2, Article number: 16004 (2016).
Ultra-Low Power Self-Computing Binary Output Digital MEMS Accelerometer
V. Kumar, X. Guo, R. Jafari, S. Pourkamali, IEEE MEMS 2016.
Single-Mask Field Emission Based Tunable MEMS Tunneling Accelerometer
V. Kumar, X. Guo, S. Pourkamali, “Single-Mask Field Emission Based Tunable MEMS Tunneling Accelerometer”, IEEE Nano, 2015.
Enhanced Parallel Scanning Probe Nanolithography through Electrically Decoupled 2D MEMS Thermal Actuators
V. Kumar, E. Mehdizadeh, S. Pourkamali, “Enhanced Parallel Scanning Probe Nanolithography through Electrically Decoupled 2D MEMS Thermal Actuators”, IEEE Nano 2015.
Sail-Shaped Piezoelectric Micro-resonators for high resolution gas flowmetry
A. Ramezany, M.Mahdavi, A. Moses, S. Pourkamali, “Sail-Shaped Piezoelectric Micro-resonators for high resolution gas flowmetry”, IEEE Transducers 2015.
Ultra Sensitive Lorentz Force MEMS Magnetometer with Pico-Tesla Limit of Detection
V. Kumar, M. Mahdavi, X. Guo, E. Mehdizadeh and S. Pourkamali, “Ultra Sensitive Lorentz Force MEMS Magnetometer with Pico-Tesla Limit of Detection”,To be presented at IEEE MEMS 2015.
Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations
M. Maldonado Garcia, E. Mehdizadeh, V. Kumar, J.C Wilson and S. Pourkamali, “Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations”, To be presented at IEEE MEMS 2015.
Integrated MEMS Actuators for Sub-Micron Patterning on Thin Polymer Films
E. Mehdizadeh and S. Pourkamali, “Integrated MEMS Actuators for Sub-Micron Patterning on Thin Polymer Films,” The 40th Annual Conference of the IEEE Industrial Electronics Society, 2014.
Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips
E. Mehdizadeh and S. Pourkamali, “Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips,” Micro & Nano Letters, Vol. 9, No. 10, pp. 673–675, 2014.
Thermal Devices
O. Brand and S. Pourkamali, “Thermal Devices,” Resonant MEMS: Principles, Modeling, Implementation and Applications Series “Advanced Micro & Nanosystems” (AMN) Wiley VCH, 2013, In Press.
High-Q Lorentz Force MEMS Magnetometer with Internal Self-Amplification
E. Mehdizadeh, V. Kumar, and S. Pourkamali, “High-Q Lorentz Force MEMS Magnetometer with Internal Self-Amplification”, To be presented at 2014 IEEE Sensors.
An Ultra High-Q Micromechanical In-plane Tuning Fork
Xiaobo Guo, Emad Mehdizadeh, Varun Kumar, Aliraza Ramezany and Siavash Pourkamali, “An Ultra High-Q Micromechanical In-plane Tuning Fork”, To be presented at 2014 IEEE Sensors
Piezoelectric Resonant MEMS Balances with High Liquid Phase Q
M. Mahdavi, G. Guerra, H. McCurry, Reza Abolvand, and S. Pourkamali, “Piezoelectric Resonant MEMS Balances with High Liquid Phase Q”, To be presented at 2014 IEEE Sensors.
Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid
E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid,” IEEE Electron Device Letters, Vol 35, No. 8, pp 874-876, August 2014.
Self-Controlled Fabrication of Single-Crystalline Silicon Nanobeams using Conventional Micromachining
E. Mehdizadeh, A. Rahafrooz, and S. Pourkamali, “Self-Controlled Fabrication of Single-Crystalline Silicon Nanobeams using Conventional Micromachining,” Nanotechnology 25, 315303, pp1-7, July 2014.
Microelectromechanical disk resonators for direct detection of liquid-phase analytes
E. Mehdizadeh, J. C. Chapin, J. M. Gonzales, A. Rahafrooz, R. Abdolvand, By. W. Purse, and S. Pourkamali, “Microelectromechanical disk resonators for direct detection of liquid-phase analytes,” Sensors and Actuators A: Physical, vol. 216, pp. 136–141, September 2014.
Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification
E. Mehdizadeh, V. Kumar, and Siavash Pourkamali, “Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification,” IEEE Electron Device Letters, vol. 35, no. 2, pp. 268–270, February 2014.
A finite element analysis of thermoelastic damping in vented MEMS beam resonators
X. Guo, Y. Yi, and S. Pourkamali, “A finite element analysis of thermoelastic damping in vented MEMS beam resonators,” International Journal of Mechanical Science, vol. 74, pp. 73–82, September 2013.
Resonant MEMS for Ultra-High Resolution Force and Displacement Measurements in Liquid
E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Resonant MEMS for Ultra-High Resolution Force and Displacement Measurements in Liquid,” Hilton Head 2014, Solid-State Sensor, Actuator and Microsystems workshop.
Resonant MEMS Piezoresistors for narrow band electronic amplification
A. Ramezany, M. Mahdavi, X. Guo, and S. Pourkamlai, “Resonant MEMS Piezoresistors for narrow band electronic amplification,” Hilton Head 2014, Solid-State Sensor, Actuator and Microsystems workshop.
Thermally Actuated Resonators
S. Pourkamali, “Thermally Actuated Resonators,” Encyclopedia of Nanotechnology, Springer-Verlag, pp. 2712–2723, 2012
High Throughput Deep Submicron Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips
E.Mehdizadeh, and S. Pourkamali, “High Throughput Deep Submicron Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips”- IEEE NEMS-2014.
Characterization of a Nanoparticle Collector with Embedded MEMS-Based Mass Monitors
E.Mehdizadeh, V. Kumar and Siavash Pourkamali, “Characterization of a Nanoparticle Collector with Embedded MEMS-Based Mass Monitors”-IEEE NEMS-2014.
Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing
X. Guo, Y. Yi, and S. Pourkamali, “Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2863–2872, August 2013.
Nano-precision force and displacement measurement using MEMS resonant structures
E. Mehdizadeh, A. Hajjam, A. Rahafrooz and S. Pourkamali, “Nano-precision force and displacement measurement using MEMS resonant structures,” IEEE Sensors Conference, 2013.
A Two-Stage Aerosol Impactor with Embedded MEMS Resonant Mass Balances for Particulate Size Segregation and Mass Concentration Monitoring
E. Mehdizadeh, V. Kumar, J. Gonzales, R. Abdolvand, and S. Pourkamali, “A Two-Stage Aerosol Impactor with Embedded MEMS Resonant Mass Balances for Particulate Size Segregation and Mass Concentration Monitoring”, IEEE Sensors Conference, 2013.
Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography
E. Mehdizadeh and S. Pourkamali, “Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography,” Proceedings of Nanomechanical Sensing Workshop, 2013.
Resonant response validation of micro-channel encapsulated disk resonators via fluorescent imaging
A. Iqbal, J. Chapin, E. Mehdizadeh, B. Purse, and S. Pourkamali, “Resonant response validation of micro-channel encapsulated disk resonators via fluorescent imaging,” International Conference on Microtechnologies in Medicine and Biology, 2013.
Response characterization of piezoelectric rotational mode disk Resonant biomolecular Sensors
E. Mehdizadeh, J. Chapin, J. Gonzales, R. Abdolvand, B. Purse, and S. Pourkamali, “Response characterization of piezoelectric rotational mode disk Resonant biomolecular Sensors,” International Conference on Microtechnologies in Medicine and Biology, 2013.
Aerosol Impactor with Embedded MEMS Resonant Mass Balance for Real-Time Particulate Mass Concentration Monitoring
E. Mehdizadeh, J. C. Wilson, A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Aerosol Impactor with Embedded MEMS Resonant Mass Balance for Real-Time Particulate Mass Concentration Monitoring,” International Conference on Solid State Sensors, Actuators, and Microsystems (Transducers), 2013.
Mode Selection Behavior of VHF Thermal-Piezoresistive Self-Sustained Oscillators
H. J. Hall, D.E. Walker, L. Wang, R.C. Fitch, J.S. Bunch, S. Pourkamali, and V.M. Bright, “Mode Selection Behavior of VHF Thermal-Piezoresistive Self-Sustained Oscillators,” International Conference on Solid State Sensors, Actuators, and Microsystems (Transducers), 2013.
Real-Time Bio-Sensing Using Micro-Channel Encapsulated Thermal-Piezoresistive Rotational Mode Disk Resonators
A. Iqbal, J. Chapin, E. Mehdizadeh, A. Rahafrooz, B. Purse, S. Pourkamali, “Real-Time Bio-Sensing Using Micro-Channel Encapsulated Thermal-Piezoresistive Rotational Mode Disk Resonators,” IEEE Sensors Conference, 2012.
Fabrication and Characterization of Miniaturized Photo-Electro-Chemical Solar Cells
X. Li, A. Rahafrooz, S. Pourkamali, “Fabrication and Characterization of Miniaturized Photo-Electro-Chemical Solar Cells,” IEEE Sensors Conference, 2012.
Direct Detection of Biomolecules in Liquid Media Using Piezoelectric Rotational Mode Disk Resonators
E. Mehdizadeh, J. Chapin, J. Gonzales, A. Rahafrooz, B. Purse, R. Abdolvand, and S. Pourkamali, “Direct Detection of Biomolecules in Liquid Media Using Piezoelectric Rotational Mode Disk Resonators,” IEEE Sensors Conference, 2012.
MEMS Resonant Human Breath Sensors for Survivor Detection in Disaster Areas
A. Hajjam, Y. Guo, K. Dietrich, S. Pourkamali, “MEMS Resonant Human Breath Sensors for Survivor Detection in Disaster Areas,” IEEE Sensors Conference, 2012.
Self-Sustained Micromechanical Resonant Pressure Sensors
X. Guo, A. Rahafrooz, Y. Yi, and S. Pourkamali, “Self-Sustained Micromechanical Resonant Pressure Sensors,” IEEE Sensors Conference, 2012. Invited for submission as a journal paper to the IEEE sensors special issue.
A self-controlled frequency trimming technique for micromechanical resonators
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “A self-controlled frequency trimming technique for micromechanical resonators,” Hilton Head 2012, solid-state sensor, actuator and Microsystems workshop.
Piezoelectric rotational mode disk resonators for liquid viscosity monitoring
E. Mehdizadeh, J. Gonzales, A. Rahafrooz, R. Abdolvand, and S. Pourkamali, “Piezoelectric rotational mode disk resonators for liquid viscosity monitoring,” Hilton Head 2012, solid-state sensor, actuator and Microsystems workshop.
Zero bias operation of thermal-piezoresistive micromechanical resonators via internal electromechanical mixing
A. Rahafrooz, and S. Pourkamali, “Zero bias operation of thermal-piezoresistive micromechanical resonators via internal electromechanical mixing,” Hilton Head 2012, solid-state sensor, actuator and Microsystems workshop.
Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation
A. Hajjam, and S. Pourkamali, “Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation,” Journal of Microelectromechanical Systems, vol. 22, no. 5, pp. 1066–1072. October 2013.
I-shaped thermally actuated VHF resonators with submicron components
H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “I-shaped thermally actuated VHF resonators with submicron components,” Sensors and Actuators A: Physical, vol. 195, pp. 160–166. June 2013.
Thermal-piezoresistive energy pumps in micromechanical resonant structures
A. Rahafrooz, and S. Pourkamali, “Thermal-piezoresistive energy pumps in micromechanical resonant structures,” IEEE Transactions on Electron Devices, vol. 59, no. 12, pp. 3587–3593, December 2012.
Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors
A. Hajjam, and S. Pourkamali, “Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors,” IEEE Sensors Journal, vol. 12, no. 6, 2012, pp. 1958–1964, June 2012.
Jitter Characterization of Fully-Micromechanical Thermal-Piezoresistive Oscillators
A. Rahafrooz, and S. Pourkamali, “Jitter Characterization of Fully-Micromechanical Thermal-Piezoresistive Oscillators,” IEEE International Frequency Control Symposium, 2012.
Gas Sensing Using Thermally Actuated Dual Plate Resonators and Oscillators
X. Guo, A. Rahafrooz, Y-B Yi, S. Pourkamali, “Gas Sensing Using Thermally Actuated Dual Plate Resonators and Oscillators,” IEEE International Frequency Control Symposium, 2012.
Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators,” IEEE International Frequency Control Symposium, 2012.
Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams,” IEEE International Frequency Control Symposium, 2012.
Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonators
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonators,” IEEE MEMS 2012.
Thermally actuated I-shaped electromechanical VHF resonators
H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “Thermally actuated I-shaped electromechanical VHF resonators,” IEEE MEMS 2012.
Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization
A. Hajjam, A. Logan, and S. Pourkamali, “Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization,” IEEE Journal of Micro-Electro-Mechanical-Systems, vol. 21, no. 3, pp. 681–687, June 2012.
Hydrogen detection using thermally actuated MEMS resonators
B. Tousifar, A. Rahafrooz, and S. Pourkamali, “Hydrogen detection using thermally actuated MEMS resonators,” proceedings, IEEE Sensors Conference, 2011.
Fabrication and characterization of MEMS-based resonant organic gas sniffers
A. Hajjam, A. Logan, and S. Pourkamali, “Fabrication and characterization of MEMS-based resonant organic gas sniffers,” proceedings, IEEE Sensors Conference, 2011.
Developing a Fully Cycled Silicon Cathode-Zinc Electrolyte Based Solar Cell Using Copper Recovery Electrodes
B. Tousifar, W. Douglas, and S. Pourkamali, “Developing a Fully Cycled Silicon Cathode-Zinc Electrolyte Based Solar Cell Using Copper Recovery Electrodes,” 37th IEEE Photovoltaic Specialists Conference (PVSC), 2011.
Individual air-borne particle mass measurement using high frequency micromechanical resonators
A. Hajjam, J. C. Wilson, and S. Pourkamali, “Individual air-borne particle mass measurement using high frequency micromechanical resonators,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2883–2890. November 2011
High frequency thermally actuated electromechanical resonators with piezoresistive readout
A. Rahafrooz, and S. Pourkamali, “High frequency thermally actuated electromechanical resonators with piezoresistive readout,” IEEE Transactions on Electron Devices, vol. 58, no. 4, pp. 1205–1214, April 2011.
Surface functionalization and monolayer formation on silicon resonant nanobalances
B. Tousifar, M. Kvasnika, B. Purse, and S. Pourkamali, “Surface functionalization and monolayer formation on silicon resonant nanobalances,” 2011 IEEE International Frequency Control Symposium (IFCS 2011). Nominated for Best Student Paper Award
High Frequency Dual-Mode Thermal-Piezoresistive Oscillators
A. Rahafrooz, and S. Pourkamali, “High Frequency Dual-Mode Thermal-Piezoresistive Oscillators,” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
Characterization of Rotational Mode Disk Resonator Quality Factors in Liquid
A. Rahafrooz, and S. Pourkamali, “Characterization of Rotational Mode Disk Resonator Quality Factors in Liquid,” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
High Frequency Thermal-Piezoresistive MEMS Resonators for Detection of Organic Gases
A. Hajjam, A. Logan, J. Pandiyan, and S. Pourkamali, “High Frequency Thermal-Piezoresistive MEMS Resonators for Detection of Organic Gases” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
Bulk modes in single-crystal silicon
G. K. Ho, S. Pourkamali, and F. Ayazi, “Bulk modes in single-crystal silicon” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators
A. Rahafrooz, S. Pourkamali, “Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators,” IEEE MEMS conference, 2011.
Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures
A. Rahafrooz, S. Pourkamali, “Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures,” IEEE MEMS conference, 2011.
Temperature compensated single-device electromechanical oscillators
A. Hajjam, A. Rahafrooz, S. Pourkamali, “Temperature compensated single-device electromechanical oscillators,” IEEE MEMS conference, 2011.
Self-sustained micromechanical resonant particlute microbalance/counters
A. Hajjam, J. Wilson, A. Rahafrooz, and S.Pourkamali, “Self-sustained micromechanical resonant particlute microbalance/counters,” IEEE MEMS conference, 2011.
Rotational Mode Disk Resonators for High-Q Operation in Liquid
A. Rahafrooz, and S. Pourkamali, “Rotational Mode Disk Resonators for High-Q Operation in Liquid,” IEEE Sensors Conference, 2010.
Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization,” proceedings, IEEE International Electron Device Meeting (IEDM), 2010.
Fully Micromechanical Piezo-Thermal Oscillators
A. Rahafrooz, and S. Pourkamali, “Fully Micromechanical Piezo-Thermal Oscillators,” IEEE International Electron Device Meeting (IEDM), 2010.
MEMS Resonant Sensors for Detection of Gasoline Vapor
A. Hajjam, J. Pandiyan, A. Rahafrooz, and S. Pourkamali, “MEMS Resonant Sensors for Detection of Gasoline Vapor,” IEEE Sensors Conference, 2010.
Detection and Mass Measurement of Individual Air-Borne Particles Using High Frequency Micromechanical Resonators
A. Hajjam, J. Wilson, A. Rahafrooz, and S. Pourkamali, “Detection and Mass Measurement of Individual Air-Borne Particles Using High Frequency Micromechanical Resonators,” IEEE Sensors Conference, 2010.
Thermo-electro-mechanical modeling of high frequency thermally actuated I2-BAR resonators
A. Rahafrooz, and S. Pourkamali, “Thermo-electro-mechanical modeling of high frequency thermally actuated I2-BAR resonators,” Hilton Head 2010, solid-state sensor, actuator and Microsystems workshop.
Characterization of a very low-cost silicon cathode-zinc electrolyte solar cell
B. Tousifar, and S. Pourkamali, “Characterization of a very low-cost silicon cathode-zinc electrolyte solar cell,” IEEE Photovoltaic Specialists Conference (PVSC), 2010.
Thin-film piezoelectric-on-silicon particle mass sensors
B. Harrington, A. Hajjam, J. C. Wilson, S. Pourkamali, R. Abdolvand, “Thin-film piezoelectric-on-silicon particle mass sensors,” IEEE international Frequency Control Symposium (IFCS), 2010.
Thermal actuation, a suitable mechanism for high-frequency electromechanical resonators
A. Rahafrooz, A. Hajjam, B. Tousifar, S. Pourkamali, “Thermal actuation, a suitable mechanism for high-frequency electromechanical resonators,” proceedings, IEEE MEMS conference, 2010, pp. 200-203.
Fabrication and characterization of resonant aerosol particle mass sensors
A. Hajjam, J. C. Wilson, A. Rahafrooz and S. Pourkamali, “Fabrication and characterization of resonant aerosol particle mass sensors,” proceedings, IEEE MEMS conference, 2010, pp. 863-866.
Thermally actuated MEMS resonant sensors for mass measurement of micro/nanoscale aerosol particles
A. Hajjam, A. Rahafrooz, J. C. Wilson, and S. Pourkamali, “Thermally actuated MEMS resonant sensors for mass measurement of micro/nanoscale aerosol particles,” proceedings, IEEE Sensors Conference, 2009, pp. 707-710.
Thermal actuation of high frequency micromechanical resonators
A. Rahafrooz, A. Hajjam, and S. Pourkamali, “Thermal actuation of high frequency micromechanical resonators,” proceedings, IEEE SOI conference, 2009.
Resonant MEMS sensors for detection of aqueous heavy metal ions with sub-ppm resolution
A. Rahafrooz, S. Pourkamali, “Resonant MEMS sensors for detection of aqueous heavy metal ions with sub-ppm resolution,” Proceedings, IEEE Electron Devices and Solid-State Circuits Conference, 2008.
Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers
S. Pourkamali, and F. Ayazi, “Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers,” Proceedings, IEEE Sensors, 2007.
Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters
Qishu Qin, Siavash Pourkamali, and Farrokh Ayazi, “Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters,” proceedings, 2007 International Ultrasonics Symposium, pp1649-1652.
High-aspect-ratio SOI vibrating micromechanical resonators and filters
F. Ayazi, S. Pourkamali, G. K. Ho and R. Abdolvand, “High-aspect-ratio SOI vibrating micromechanical resonators and filters,” invited paper, proceedings, International Microwave Symposium, 2006 (IMS’06), pp. 676-679.
A low phase noise 100MHz silicon BAW reference oscillator
K. Sundaresan, G. K. Ho, S. Pourkamali and F. Ayazi, “A low phase noise 100MHz silicon BAW reference oscillator,” proceedings, Custom Integrated Circuit Conference, 2006 (CICC’06).
High frequency low impedance silicon BAR structures
S. Pourkamali and F. Ayazi, “High frequency low impedance silicon BAR structures,” Proceedings, Hilton Head 2006, solid-state sensor, actuator and Microsystems workshop, pp. 284-287.
Temperature compensated IBAR reference oscillators
G.K. Ho, K. Sundaresan, S. Pourkamali and F. Ayazi, “Temperature compensated IBAR reference oscillators,” proceeding, MEMS’06, pp. 910-913.
Vertical Capacitive SiBARs
S. Pourkamali, G. K. Ho and F. Ayazi, “Vertical Capacitive SiBARs,” proceedings, MEMS’05, pp. 211-214.
Low impedance, highly tunable, I2-resonators for temperature compensated reference oscillators
G.K. Ho, K. ndaresan, S. Pourkamali and F. Ayazi, “Low impedance, highly tunable, I2-resonators for temperature compensated reference oscillators,” proceedings, MEMS’05, pp. 116-120.
A 2-chip micro-electro-mechanical reference oscillator
K. Sundaresan, G.K. Ho, S. Pourkamali and F. Ayazi, “A 2-chip micro-electro-mechanical reference oscillator,” proceedings, ISCAS‘05, pp.5461-5464.
Longitudinal block resonators for detecting mass variation at single molecule sensitivity
Z. Hao, S. Pourkamali and F. Ayazi, “Longitudinal block resonators for detecting mass variation at single molecule sensitivity,” the 5th Georgia Tech Conf. on Nanoscience and Nanotech., Nov. 2004.
High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology
S. Pourkamali and F. Ayazi, “High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology,” 5th Silicon RF topical meeting 2004, pp. 147-150.
18mm thick high frequency capacitive HARPSS resonators with reduced motional resistance
S. Pourkamali and F. Ayazi, “18mm thick high frequency capacitive HARPSS resonators with reduced motional resistance,” proceedings, Hilton Head 2004, solid-state sensor, actuator and Microsystems workshop, pp. 392-393.
A new input switching scheme for a capacitive micro-g accelerometer
B. Vakili, S. Pourkamali and F. Ayazi, “A new input switching scheme for a capacitive micro-g accelerometer,” proceedings, Symposium on VLSI Circuits, 2004, pp. 310 – 313.
Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps
S. Pourkamali, and F. Ayazi, “Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps,” proceedings, MEMS’04, pp. 813-816.
Electrostatically coupled micromechanical beam filters
S. Pourkamali, R. Abdolvand, G. K. Ho, and F. Ayazi, “Electrostatically coupled micromechanical beam filters,” proceedings, MEMS’04, pp. 584-587.
A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25mm CMOS interface
B. Vakili, S. Pourkamali, and F. Ayazi, “A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25mm CMOS interface,” proceedings, MEMS’04, pp.572-575.
SOI-based HF and VHF single-crystal silicon resonators with sub-100nm vertical capacitive gaps
S. Pourkamali, and F. Ayazi, “SOI-based HF and VHF single-crystal silicon resonators with sub-100nm vertical capacitive gaps,” proceedings, Transducers ’03, 2003, pp.837-840.
A 600kHz electrically coupled MEMS bandpass filter
S. Pourkamali, R. Abdolvand, and F. Ayazi, “A 600kHz electrically coupled MEMS bandpass filter,” proceedings, MEMS‘03, 2003, pp. 702-705.
Single crystal silicon HARPSS capacitive resonators with submicron gap spacings
S. Y. No, A. Hashimura, S. Pourkamali, F. Ayazi, “Single crystal silicon HARPSS capacitive resonators with submicron gap spacings,” proceedings, Hilton Head 2002, solid-state sensor, actuator and Microsystems workshop, pp. 281-284.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization
A. Hajjam, J. C. Wilson, A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization,” Journal of Micromechanics and Microengineering, Vol. 20, Issue 12, 125019, November 2010.
Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling
A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125018, November 2010.
Micromechanical IBARS: tunable high-Q resonators for temperature-compensated reference oscillators
G. K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, “Micromechanical IBARS: tunable high-Q resonators for temperature-compensated reference oscillators,” Journal of Micro-Electro-Mechanical-Systems, vol. 19, no. 3, pp. 503–515, June 2010.
Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators
A. Rahafrooz, and S. Pourkamali, “Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators,” Journal of Micromechanics and Microengineering, vol. 19, no. 11, 115003, September 2009.
Modeling and testing of the collective effects of thermoelastic and fluid damping on silicon MEMS resonators
Y. Yi, A. Rahafrooz, and S. Pourkamali, “Modeling and testing of the collective effects of thermoelastic and fluid damping on silicon MEMS resonators,” J. Micro/Nanolith. MEMS MOEMS, vol. 8, no. 2, 023010, May 2009.
Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part I: concept and fabrication
S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part I: concept and fabrication,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2017–2023, August 2007.
Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part II: measurement and characterization
S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part II: measurement and characterization,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2024–2030, August 2007.
Electronically temperature compenstated silicon bulk acoustic resonator reference oscillator
K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “Electronically temperature compensated silicon bulk acoustic resonator reference oscillator,” IEEE Journal of Solid State Circuits, vol. 42, no. 6, pp. 1425–1434, June 2007.
Electrically coupled MEMS bandpass filters-Part II: without coupling element
S. Pourkamali and F. Ayazi, “Electrically coupled MEMS bandpass filters-Part II: without coupling element,” Sensors and Actuators A: Physical, vol. 122, no. 2, pp. 317–325, August 2005.
Electrically coupled MEMS bandpass filters-Part I: with coupling element
S. Pourkamali and F. Ayazi, “Electrically coupled MEMS bandpass filters-Part I: with coupling element,” Journal of Sensors and Actuators A: Physical, vol. 122, no. 2, pp.307–316, August 2005.
VHF single crystal silicon side supported disk resonators-Part I: Design and Modeling
Z. Hao, S. Pourkamali and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part I: Design and Modeling,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1043–1053, December 2004.
VHF single crystal silicon side supported disk resonators-Part II: implementation and characterization
S. Pourkamali, Z. Hao and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part II: implementation and characterization,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1054–1062, December. 2004.
High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps
S. Pourkamali, et al, “High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps,” Journal of Micro Electro Mechanical Systems, vol. 12, no. 4, pp. 487–496, August 2003.
V. Qaradaghi, B. Dousti, Y. Choi, G. S. Lee, W. Hu, and S. Pourkamali, “Surface Area Enhancement of Nanomechanical Disk Resonators Using MWCNT for Mass Sensing Applications,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 66, Issue 3, March
M. Mahdavi, A. Abbasalipour, and S. Pourkamali, “Thin Film Piezoelectric-on-Silicon Elliptical Resonators with Low Liquid Phase Motional Resistances,” IEEE Sensors Journal, vol. 19, no. 1, pp. 113–120, Jan. 2019.
V. Qaradaghi, A. Ramezany, S. Babu, and S. Pourkamali, “Nanomechanical Disk Resonators as Highly Sensitive Mass Sensors”, IEEE Electron Device Letters (EDL), Vol. 39, Issue 11, Nov. 2018.
M. Mahdavi and S. Pourkamali, “Micro-Resonator-on-Membrane for Real-Time Mass Detection in Liquid Phase,” IEEE Sensors Letters, vol. 2, no. 3, pp. 1–4, Sep. 2018.
M. Mahdavi, E. Mehdizadeh, and S. Pourkamali, “Piezoelectric MEMS Resonant Dew Point Meters,” Sens. Actuators Phys., Vol. 276, June 2018, pp. 52-61.
A. Ramezany and S. Pourkamali, “Ultra-High Frequency Nanomechanical Piezoresistive Amplifiers for Direct Channel-Selective Receiver Front-Ends”, Nano Letters, 2018, 18 (4), pp 2551–2556.
V. Kumar, S. Sebdani, S. Pourkamali, “Sensitivity Enhancement of a Lorentz Force MEMS Magnetometer with Frequency Modulated Output”, Journal of Microelectromechanical Systems, Vol 26, Issue 4, pp 870-878, Aug 2017.
E. Mehdizadeh, V. Kumar, J. Wilson, S. Pourkamali, “Inertial Impaction on MEMS Balance Chips for Real-Time Air Quality Monitoring”, IEEE Sensors Journal, Vol. 17, Issue 8, pp 2329-2337, April 2017.
M. Maldonado -Garcia, V. Kumar, J.C. Wilson, and S. Pourkamali, “Chip-scale implementation and Cascade Assembly of particulate matter Collectors with embedded resonant mass balances”, Accepted for Publication, IEEE Sensors Journal, November 2016.
V. Kumar, A. Ramezany, M. Mahdavi, S. Pourkamali, “Amplitude Modulated Lorentz Force MEMS Magnetometer with Pico-tesla sensitivity”, Journal of Micromechanics and Microengineering, Volume 26, Number 10, 105021, September 2016.
M. Mahdavi, A. Abbasalipour, A. Ramezany and S. Pourkamali, “Micromachined Frequency-output Force Probes,” IEEE Sensor Journals,Volume 16, Issue 14, pp5520-5521, May 2016.
V. Kumar, E. Mehdizadeh, S. Pourkamali, “Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography”, IEEE Transactions on NanoTechnology, Vol 15, Issue 3, pp. 457-464.
V. Kumar, R. Jafari, S. Pourkamali, “Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer”, Accepted for Publication, IEEE Sensors Journal, May 2016.
Alireza Ramezany, Mohammad Mahdavi & Siavash Pourkamali, “Nanoelectromechanical resonant narrow-band amplifiers”, Microsystems & Nanoengineering 2, Article number: 16004 (2016).
V. Kumar, X. Guo, R. Jafari, S. Pourkamali, IEEE MEMS 2016.
V. Kumar, X. Guo, S. Pourkamali, “Single-Mask Field Emission Based Tunable MEMS Tunneling Accelerometer”, IEEE Nano, 2015.
V. Kumar, E. Mehdizadeh, S. Pourkamali, “Enhanced Parallel Scanning Probe Nanolithography through Electrically Decoupled 2D MEMS Thermal Actuators”, IEEE Nano 2015.
A. Ramezany, M.Mahdavi, A. Moses, S. Pourkamali, “Sail-Shaped Piezoelectric Micro-resonators for high resolution gas flowmetry”, IEEE Transducers 2015.
V. Kumar, M. Mahdavi, X. Guo, E. Mehdizadeh and S. Pourkamali, “Ultra Sensitive Lorentz Force MEMS Magnetometer with Pico-Tesla Limit of Detection”,To be presented at IEEE MEMS 2015.
M. Maldonado Garcia, E. Mehdizadeh, V. Kumar, J.C Wilson and S. Pourkamali, “Chip Scale Aerosol Impactor With Integrated Resonant Mass Balances For Real Time Monitoring of Airborne Particulate Concentrations”, To be presented at IEEE MEMS 2015.
E. Mehdizadeh and S. Pourkamali, “Integrated MEMS Actuators for Sub-Micron Patterning on Thin Polymer Films,” The 40th Annual Conference of the IEEE Industrial Electronics Society, 2014.
E. Mehdizadeh and S. Pourkamali, “Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips,” Micro & Nano Letters, Vol. 9, No. 10, pp. 673–675, 2014.
O. Brand and S. Pourkamali, “Thermal Devices,” Resonant MEMS: Principles, Modeling, Implementation and Applications Series “Advanced Micro & Nanosystems” (AMN) Wiley VCH, 2013, In Press.
E. Mehdizadeh, V. Kumar, and S. Pourkamali, “High-Q Lorentz Force MEMS Magnetometer with Internal Self-Amplification”, To be presented at 2014 IEEE Sensors.
Xiaobo Guo, Emad Mehdizadeh, Varun Kumar, Aliraza Ramezany and Siavash Pourkamali, “An Ultra High-Q Micromechanical In-plane Tuning Fork”, To be presented at 2014 IEEE Sensors
M. Mahdavi, G. Guerra, H. McCurry, Reza Abolvand, and S. Pourkamali, “Piezoelectric Resonant MEMS Balances with High Liquid Phase Q”, To be presented at 2014 IEEE Sensors.
E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid,” IEEE Electron Device Letters, Vol 35, No. 8, pp 874-876, August 2014.
E. Mehdizadeh, A. Rahafrooz, and S. Pourkamali, “Self-Controlled Fabrication of Single-Crystalline Silicon Nanobeams using Conventional Micromachining,” Nanotechnology 25, 315303, pp1-7, July 2014.
E. Mehdizadeh, J. C. Chapin, J. M. Gonzales, A. Rahafrooz, R. Abdolvand, By. W. Purse, and S. Pourkamali, “Microelectromechanical disk resonators for direct detection of liquid-phase analytes,” Sensors and Actuators A: Physical, vol. 216, pp. 136–141, September 2014.
E. Mehdizadeh, V. Kumar, and Siavash Pourkamali, “Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification,” IEEE Electron Device Letters, vol. 35, no. 2, pp. 268–270, February 2014.
X. Guo, Y. Yi, and S. Pourkamali, “A finite element analysis of thermoelastic damping in vented MEMS beam resonators,” International Journal of Mechanical Science, vol. 74, pp. 73–82, September 2013.
E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Resonant MEMS for Ultra-High Resolution Force and Displacement Measurements in Liquid,” Hilton Head 2014, Solid-State Sensor, Actuator and Microsystems workshop.
A. Ramezany, M. Mahdavi, X. Guo, and S. Pourkamlai, “Resonant MEMS Piezoresistors for narrow band electronic amplification,” Hilton Head 2014, Solid-State Sensor, Actuator and Microsystems workshop.
S. Pourkamali, “Thermally Actuated Resonators,” Encyclopedia of Nanotechnology, Springer-Verlag, pp. 2712–2723, 2012
E.Mehdizadeh, and S. Pourkamali, “High Throughput Deep Submicron Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips”- IEEE NEMS-2014.
E.Mehdizadeh, V. Kumar and Siavash Pourkamali, “Characterization of a Nanoparticle Collector with Embedded MEMS-Based Mass Monitors”-IEEE NEMS-2014.
X. Guo, Y. Yi, and S. Pourkamali, “Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2863–2872, August 2013.
E. Mehdizadeh, A. Hajjam, A. Rahafrooz and S. Pourkamali, “Nano-precision force and displacement measurement using MEMS resonant structures,” IEEE Sensors Conference, 2013.
E. Mehdizadeh, V. Kumar, J. Gonzales, R. Abdolvand, and S. Pourkamali, “A Two-Stage Aerosol Impactor with Embedded MEMS Resonant Mass Balances for Particulate Size Segregation and Mass Concentration Monitoring”, IEEE Sensors Conference, 2013.
E. Mehdizadeh and S. Pourkamali, “Two Degrees-Of-Freedom Thermally Actuated Nano-Positioner with Integrated Nano-Tips For Scanning Probe Nanolithography,” Proceedings of Nanomechanical Sensing Workshop, 2013.
A. Iqbal, J. Chapin, E. Mehdizadeh, B. Purse, and S. Pourkamali, “Resonant response validation of micro-channel encapsulated disk resonators via fluorescent imaging,” International Conference on Microtechnologies in Medicine and Biology, 2013.
E. Mehdizadeh, J. Chapin, J. Gonzales, R. Abdolvand, B. Purse, and S. Pourkamali, “Response characterization of piezoelectric rotational mode disk Resonant biomolecular Sensors,” International Conference on Microtechnologies in Medicine and Biology, 2013.
E. Mehdizadeh, J. C. Wilson, A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Aerosol Impactor with Embedded MEMS Resonant Mass Balance for Real-Time Particulate Mass Concentration Monitoring,” International Conference on Solid State Sensors, Actuators, and Microsystems (Transducers), 2013.
H. J. Hall, D.E. Walker, L. Wang, R.C. Fitch, J.S. Bunch, S. Pourkamali, and V.M. Bright, “Mode Selection Behavior of VHF Thermal-Piezoresistive Self-Sustained Oscillators,” International Conference on Solid State Sensors, Actuators, and Microsystems (Transducers), 2013.
A. Iqbal, J. Chapin, E. Mehdizadeh, A. Rahafrooz, B. Purse, S. Pourkamali, “Real-Time Bio-Sensing Using Micro-Channel Encapsulated Thermal-Piezoresistive Rotational Mode Disk Resonators,” IEEE Sensors Conference, 2012.
X. Li, A. Rahafrooz, S. Pourkamali, “Fabrication and Characterization of Miniaturized Photo-Electro-Chemical Solar Cells,” IEEE Sensors Conference, 2012.
E. Mehdizadeh, J. Chapin, J. Gonzales, A. Rahafrooz, B. Purse, R. Abdolvand, and S. Pourkamali, “Direct Detection of Biomolecules in Liquid Media Using Piezoelectric Rotational Mode Disk Resonators,” IEEE Sensors Conference, 2012.
A. Hajjam, Y. Guo, K. Dietrich, S. Pourkamali, “MEMS Resonant Human Breath Sensors for Survivor Detection in Disaster Areas,” IEEE Sensors Conference, 2012.
X. Guo, A. Rahafrooz, Y. Yi, and S. Pourkamali, “Self-Sustained Micromechanical Resonant Pressure Sensors,” IEEE Sensors Conference, 2012. Invited for submission as a journal paper to the IEEE sensors special issue.
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “A self-controlled frequency trimming technique for micromechanical resonators,” Hilton Head 2012, solid-state sensor, actuator and Microsystems workshop.
E. Mehdizadeh, J. Gonzales, A. Rahafrooz, R. Abdolvand, and S. Pourkamali, “Piezoelectric rotational mode disk resonators for liquid viscosity monitoring,” Hilton Head 2012, solid-state sensor, actuator and Microsystems workshop.
A. Rahafrooz, and S. Pourkamali, “Zero bias operation of thermal-piezoresistive micromechanical resonators via internal electromechanical mixing,” Hilton Head 2012, solid-state sensor, actuator and Microsystems workshop.
A. Hajjam, and S. Pourkamali, “Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation,” Journal of Microelectromechanical Systems, vol. 22, no. 5, pp. 1066–1072. October 2013.
H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “I-shaped thermally actuated VHF resonators with submicron components,” Sensors and Actuators A: Physical, vol. 195, pp. 160–166. June 2013.
A. Rahafrooz, and S. Pourkamali, “Thermal-piezoresistive energy pumps in micromechanical resonant structures,” IEEE Transactions on Electron Devices, vol. 59, no. 12, pp. 3587–3593, December 2012.
A. Hajjam, and S. Pourkamali, “Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors,” IEEE Sensors Journal, vol. 12, no. 6, 2012, pp. 1958–1964, June 2012.
A. Rahafrooz, and S. Pourkamali, “Jitter Characterization of Fully-Micromechanical Thermal-Piezoresistive Oscillators,” IEEE International Frequency Control Symposium, 2012.
X. Guo, A. Rahafrooz, Y-B Yi, S. Pourkamali, “Gas Sensing Using Thermally Actuated Dual Plate Resonators and Oscillators,” IEEE International Frequency Control Symposium, 2012.
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Electrostatic frequency tuning and Q-improvement of in-plane dual-plate MEMS resonators,” IEEE International Frequency Control Symposium, 2012.
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams,” IEEE International Frequency Control Symposium, 2012.
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonators,” IEEE MEMS 2012.
H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “Thermally actuated I-shaped electromechanical VHF resonators,” IEEE MEMS 2012.
A. Hajjam, A. Logan, and S. Pourkamali, “Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization,” IEEE Journal of Micro-Electro-Mechanical-Systems, vol. 21, no. 3, pp. 681–687, June 2012.
B. Tousifar, A. Rahafrooz, and S. Pourkamali, “Hydrogen detection using thermally actuated MEMS resonators,” proceedings, IEEE Sensors Conference, 2011.
A. Hajjam, A. Logan, and S. Pourkamali, “Fabrication and characterization of MEMS-based resonant organic gas sniffers,” proceedings, IEEE Sensors Conference, 2011.
B. Tousifar, W. Douglas, and S. Pourkamali, “Developing a Fully Cycled Silicon Cathode-Zinc Electrolyte Based Solar Cell Using Copper Recovery Electrodes,” 37th IEEE Photovoltaic Specialists Conference (PVSC), 2011.
A. Hajjam, J. C. Wilson, and S. Pourkamali, “Individual air-borne particle mass measurement using high frequency micromechanical resonators,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2883–2890. November 2011
A. Rahafrooz, and S. Pourkamali, “High frequency thermally actuated electromechanical resonators with piezoresistive readout,” IEEE Transactions on Electron Devices, vol. 58, no. 4, pp. 1205–1214, April 2011.
B. Tousifar, M. Kvasnika, B. Purse, and S. Pourkamali, “Surface functionalization and monolayer formation on silicon resonant nanobalances,” 2011 IEEE International Frequency Control Symposium (IFCS 2011). Nominated for Best Student Paper Award
A. Rahafrooz, and S. Pourkamali, “High Frequency Dual-Mode Thermal-Piezoresistive Oscillators,” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
A. Rahafrooz, and S. Pourkamali, “Characterization of Rotational Mode Disk Resonator Quality Factors in Liquid,” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
A. Hajjam, A. Logan, J. Pandiyan, and S. Pourkamali, “High Frequency Thermal-Piezoresistive MEMS Resonators for Detection of Organic Gases” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
G. K. Ho, S. Pourkamali, and F. Ayazi, “Bulk modes in single-crystal silicon” 2011 IEEE International Frequency Control Symposium (IFCS 2011).
A. Rahafrooz, S. Pourkamali, “Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators,” IEEE MEMS conference, 2011.
A. Rahafrooz, S. Pourkamali, “Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures,” IEEE MEMS conference, 2011.
A. Hajjam, A. Rahafrooz, S. Pourkamali, “Temperature compensated single-device electromechanical oscillators,” IEEE MEMS conference, 2011.
A. Hajjam, J. Wilson, A. Rahafrooz, and S.Pourkamali, “Self-sustained micromechanical resonant particlute microbalance/counters,” IEEE MEMS conference, 2011.
A. Rahafrooz, and S. Pourkamali, “Rotational Mode Disk Resonators for High-Q Operation in Liquid,” IEEE Sensors Conference, 2010.
A. Hajjam, A. Rahafrooz, and S. Pourkamali, “Sub-100ppb/ºC Temperature Stability in Thermally Actuated High Frequency Silicon Resonators via Degenerate Phosphorous Doping and Bias Current Optimization,” proceedings, IEEE International Electron Device Meeting (IEDM), 2010.
A. Rahafrooz, and S. Pourkamali, “Fully Micromechanical Piezo-Thermal Oscillators,” IEEE International Electron Device Meeting (IEDM), 2010.
A. Hajjam, J. Pandiyan, A. Rahafrooz, and S. Pourkamali, “MEMS Resonant Sensors for Detection of Gasoline Vapor,” IEEE Sensors Conference, 2010.
A. Hajjam, J. Wilson, A. Rahafrooz, and S. Pourkamali, “Detection and Mass Measurement of Individual Air-Borne Particles Using High Frequency Micromechanical Resonators,” IEEE Sensors Conference, 2010.
A. Rahafrooz, and S. Pourkamali, “Thermo-electro-mechanical modeling of high frequency thermally actuated I2-BAR resonators,” Hilton Head 2010, solid-state sensor, actuator and Microsystems workshop.
B. Tousifar, and S. Pourkamali, “Characterization of a very low-cost silicon cathode-zinc electrolyte solar cell,” IEEE Photovoltaic Specialists Conference (PVSC), 2010.
B. Harrington, A. Hajjam, J. C. Wilson, S. Pourkamali, R. Abdolvand, “Thin-film piezoelectric-on-silicon particle mass sensors,” IEEE international Frequency Control Symposium (IFCS), 2010.
A. Rahafrooz, A. Hajjam, B. Tousifar, S. Pourkamali, “Thermal actuation, a suitable mechanism for high-frequency electromechanical resonators,” proceedings, IEEE MEMS conference, 2010, pp. 200-203.
A. Hajjam, J. C. Wilson, A. Rahafrooz and S. Pourkamali, “Fabrication and characterization of resonant aerosol particle mass sensors,” proceedings, IEEE MEMS conference, 2010, pp. 863-866.
A. Hajjam, A. Rahafrooz, J. C. Wilson, and S. Pourkamali, “Thermally actuated MEMS resonant sensors for mass measurement of micro/nanoscale aerosol particles,” proceedings, IEEE Sensors Conference, 2009, pp. 707-710.
A. Rahafrooz, A. Hajjam, and S. Pourkamali, “Thermal actuation of high frequency micromechanical resonators,” proceedings, IEEE SOI conference, 2009.
A. Rahafrooz, S. Pourkamali, “Resonant MEMS sensors for detection of aqueous heavy metal ions with sub-ppm resolution,” Proceedings, IEEE Electron Devices and Solid-State Circuits Conference, 2008.
S. Pourkamali, and F. Ayazi, “Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers,” Proceedings, IEEE Sensors, 2007.
Qishu Qin, Siavash Pourkamali, and Farrokh Ayazi, “Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters,” proceedings, 2007 International Ultrasonics Symposium, pp1649-1652.
F. Ayazi, S. Pourkamali, G. K. Ho and R. Abdolvand, “High-aspect-ratio SOI vibrating micromechanical resonators and filters,” invited paper, proceedings, International Microwave Symposium, 2006 (IMS’06), pp. 676-679.
K. Sundaresan, G. K. Ho, S. Pourkamali and F. Ayazi, “A low phase noise 100MHz silicon BAW reference oscillator,” proceedings, Custom Integrated Circuit Conference, 2006 (CICC’06).
S. Pourkamali and F. Ayazi, “High frequency low impedance silicon BAR structures,” Proceedings, Hilton Head 2006, solid-state sensor, actuator and Microsystems workshop, pp. 284-287.
G.K. Ho, K. Sundaresan, S. Pourkamali and F. Ayazi, “Temperature compensated IBAR reference oscillators,” proceeding, MEMS’06, pp. 910-913.
S. Pourkamali, G. K. Ho and F. Ayazi, “Vertical Capacitive SiBARs,” proceedings, MEMS’05, pp. 211-214.
G.K. Ho, K. ndaresan, S. Pourkamali and F. Ayazi, “Low impedance, highly tunable, I2-resonators for temperature compensated reference oscillators,” proceedings, MEMS’05, pp. 116-120.
K. Sundaresan, G.K. Ho, S. Pourkamali and F. Ayazi, “A 2-chip micro-electro-mechanical reference oscillator,” proceedings, ISCAS‘05, pp.5461-5464.
Z. Hao, S. Pourkamali and F. Ayazi, “Longitudinal block resonators for detecting mass variation at single molecule sensitivity,” the 5th Georgia Tech Conf. on Nanoscience and Nanotech., Nov. 2004.
S. Pourkamali and F. Ayazi, “High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology,” 5th Silicon RF topical meeting 2004, pp. 147-150.
S. Pourkamali and F. Ayazi, “18mm thick high frequency capacitive HARPSS resonators with reduced motional resistance,” proceedings, Hilton Head 2004, solid-state sensor, actuator and Microsystems workshop, pp. 392-393.
B. Vakili, S. Pourkamali and F. Ayazi, “A new input switching scheme for a capacitive micro-g accelerometer,” proceedings, Symposium on VLSI Circuits, 2004, pp. 310 – 313.
S. Pourkamali, and F. Ayazi, “Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps,” proceedings, MEMS’04, pp. 813-816.
S. Pourkamali, R. Abdolvand, G. K. Ho, and F. Ayazi, “Electrostatically coupled micromechanical beam filters,” proceedings, MEMS’04, pp. 584-587.
B. Vakili, S. Pourkamali, and F. Ayazi, “A high resolution, stictionless, CMOS compatible SOI accelerometer with a low noise, low power, 0.25mm CMOS interface,” proceedings, MEMS’04, pp.572-575.
S. Pourkamali, and F. Ayazi, “SOI-based HF and VHF single-crystal silicon resonators with sub-100nm vertical capacitive gaps,” proceedings, Transducers ’03, 2003, pp.837-840.
S. Pourkamali, R. Abdolvand, and F. Ayazi, “A 600kHz electrically coupled MEMS bandpass filter,” proceedings, MEMS‘03, 2003, pp. 702-705.
S. Y. No, A. Hashimura, S. Pourkamali, F. Ayazi, “Single crystal silicon HARPSS capacitive resonators with submicron gap spacings,” proceedings, Hilton Head 2002, solid-state sensor, actuator and Microsystems workshop, pp. 281-284.
A. Hajjam, J. C. Wilson, A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization,” Journal of Micromechanics and Microengineering, Vol. 20, Issue 12, 125019, November 2010.
A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125018, November 2010.
G. K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, “Micromechanical IBARS: tunable high-Q resonators for temperature-compensated reference oscillators,” Journal of Micro-Electro-Mechanical-Systems, vol. 19, no. 3, pp. 503–515, June 2010.
A. Rahafrooz, and S. Pourkamali, “Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators,” Journal of Micromechanics and Microengineering, vol. 19, no. 11, 115003, September 2009.
Y. Yi, A. Rahafrooz, and S. Pourkamali, “Modeling and testing of the collective effects of thermoelastic and fluid damping on silicon MEMS resonators,” J. Micro/Nanolith. MEMS MOEMS, vol. 8, no. 2, 023010, May 2009.
S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part I: concept and fabrication,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2017–2023, August 2007.
S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part II: measurement and characterization,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2024–2030, August 2007.
K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “Electronically temperature compensated silicon bulk acoustic resonator reference oscillator,” IEEE Journal of Solid State Circuits, vol. 42, no. 6, pp. 1425–1434, June 2007.
S. Pourkamali and F. Ayazi, “Electrically coupled MEMS bandpass filters-Part II: without coupling element,” Sensors and Actuators A: Physical, vol. 122, no. 2, pp. 317–325, August 2005.
S. Pourkamali and F. Ayazi, “Electrically coupled MEMS bandpass filters-Part I: with coupling element,” Journal of Sensors and Actuators A: Physical, vol. 122, no. 2, pp.307–316, August 2005.
Z. Hao, S. Pourkamali and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part I: Design and Modeling,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1043–1053, December 2004.
S. Pourkamali, Z. Hao and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part II: implementation and characterization,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1054–1062, December. 2004.
S. Pourkamali, et al, “High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps,” Journal of Micro Electro Mechanical Systems, vol. 12, no. 4, pp. 487–496, August 2003.