S. Pourkamali, “Electrostatic Internal Actuation of Micro/Nanomechanical Resonators using Embedded Monolithic Semiconductor PN Junctions,” May 2009. Provisional Application Filed, December 2009, Application abandoned December 2010.
S. Pourkamali, “Electrostatic Internal Actuation of Micro/Nanomechanical Resonators using Embedded Monolithic Semiconductor PN Junctions,” May 2009. Provisional Application Filed, December 2009, Application abandoned December 2010.