S. Pourkamali, Z. Hao and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part II: implementation and characterization,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1054–1062, December. 2004. 
S. Pourkamali, Z. Hao and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part II: implementation and characterization,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1054–1062, December. 2004.