Journal Publications

Book Chapters

  1. O. Brand and S. Pourkamali, “Thermal Devices,” Resonant MEMS: Principles, Modeling,  Implementation and Applications Series “Advanced Micro & Nanosystems” (AMN) Wiley VCH, 2013, In Press.
  2. S. Pourkamali, “Thermally Actuated Resonators,” Encyclopedia of Nanotechnology, Springer-Verlag, pp. 2712–2723, 2012

Journal Publications

  1. V. Kumar, S. Sebdani, S. Pourkamali, “Sensitivity Enhancement of a Lorentz Force MEMS Magnetometer with Frequency Modulated Output”, Journal of Microelectromechanical Systems, Vol 26, Issue 4, pp 870-878, Aug 2017.

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  2. E. Mehdizadeh, V. Kumar, J. Wilson, S. Pourkamali, “Inertial Impaction on MEMS Balance Chips for Real-Time Air Quality Monitoring”, IEEE Sensors Journal, Vol. 17, Issue 8, pp 2329-2337, April 2017.

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  3. M. Maldonado -Garcia, V. Kumar, J.C. Wilson, and S. Pourkamali, “Chip-scale implementation and Cascade Assembly of particulate matter Collectors with embedded resonant mass balances”, Accepted for Publication, IEEE Sensors Journal, November 2016.

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  4. V. Kumar, A. Ramezany, M. Mahdavi, S. Pourkamali, “Amplitude Modulated Lorentz Force MEMS Magnetometer with Pico-tesla sensitivity”, Journal of Micromechanics and Microengineering, Volume 26, Number 10, 105021, September 2016.

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  5. M. Mahdavi, A. Abbasalipour, A. Ramezany and S. Pourkamali, “Micromachined Frequency-output Force Probes,” IEEE Sensor Journals,Volume 16, Issue 14, pp5520-5521, May 2016.

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  6. V. Kumar, E. Mehdizadeh, S. Pourkamali, “Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography”, IEEE Transactions on NanoTechnology, Vol 15, Issue 3, pp. 457-464.

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  7. V. Kumar, R. Jafari, S. Pourkamali, “Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer”, Accepted for Publication, IEEE Sensors Journal, May 2016.

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  8. Alireza Ramezany, Mohammad Mahdavi & Siavash Pourkamali, “Nanoelectromechanical resonant narrow-band amplifiers”, Microsystems & Nanoengineering 2, Article number: 16004 (2016).

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  9. E. Mehdizadeh and S. Pourkamali, “Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips,” Micro & Nano Letters, Vol. 9, No. 10, pp. 673–675, 2014. pdf

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  10. E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid,” IEEE Electron Device Letters, Vol 35, No. 8, pp 874-876, August 2014. pdf

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  11. E. Mehdizadeh, A. Rahafrooz, and S. Pourkamali, “Self-Controlled Fabrication of Single-Crystalline Silicon Nanobeams using Conventional Micromachining,” Nanotechnology 25, 315303, pp1-7, July 2014. pdf

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  12. E. Mehdizadeh, J. C. Chapin, J. M. Gonzales, A. Rahafrooz, R. Abdolvand, By. W. Purse, and S. Pourkamali, “Microelectromechanical disk resonators for direct detection of liquid-phase analytes,” Sensors and Actuators A: Physical, vol. 216, pp. 136–141, September 2014. pdf

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  13. E. Mehdizadeh, V. Kumar, and Siavash Pourkamali, “Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification,” IEEE Electron Device Letters, vol. 35, no. 2, pp. 268–270, February 2014. pdf

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  14. X. Guo, Y. Yi, and S. Pourkamali, “A finite element analysis of thermoelastic damping in vented MEMS beam resonators,” International Journal of Mechanical Science, vol. 74, pp. 73–82, September 2013. pdf

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  15. X. Guo, Y. Yi, and S. Pourkamali, “Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2863–2872, August 2013. pdf

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  16. A. Hajjam, and S. Pourkamali, “Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation,” Journal of Microelectromechanical Systems, vol. 22, no. 5, pp. 1066–1072. October 2013. pdf

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  17. H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “I-shaped thermally actuated VHF resonators with submicron components,” Sensors and Actuators A: Physical, vol. 195, pp. 160–166. June 2013. pdf

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  18. A. Rahafrooz, and S. Pourkamali, “Thermal-piezoresistive energy pumps in micromechanical resonant structures,” IEEE Transactions on Electron Devices, vol. 59, no. 12, pp. 3587–3593, December 2012. pdf

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  19. A. Hajjam, and S. Pourkamali, “Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors,” IEEE Sensors Journal, vol. 12, no. 6, 2012, pp. 1958–1964, June 2012. pdf

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  20. A. Hajjam, A. Logan, and S. Pourkamali, “Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization,” IEEE Journal of Micro-Electro-Mechanical-Systems, vol. 21, no. 3, pp. 681–687, June 2012. pdf

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  21. A. Hajjam, J. C. Wilson, and S. Pourkamali, “Individual air-borne particle mass measurement using high frequency micromechanical resonators,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2883–2890. November 2011 pdf

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  22. A. Rahafrooz, and S. Pourkamali, “High frequency thermally actuated electromechanical resonators with piezoresistive readout,” IEEE Transactions on Electron Devices, vol. 58, no. 4, pp. 1205–1214, April 2011. pdf

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  23. A. Hajjam, J. C. Wilson, A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125019, November 2010. pdf

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  24. A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125018, November 2010. pdf

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  25. G. K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, “Micromechanical IBARS: tunable high-Q resonators for temperature-compensated reference oscillators,” Journal of Micro-Electro-Mechanical-Systems, vol. 19, no. 3, pp. 503–515, June 2010. pdf

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  26. A. Rahafrooz, and S. Pourkamali, “Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators,” Journal of Micromechanics and Microengineering, vol. 19, no. 11, 115003, September 2009. pdf

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  27. Y. Yi, A. Rahafrooz, and S. Pourkamali, “Modeling and testing of the collective effects of thermoelastic and fluid damping on silicon MEMS resonators,” J. Micro/Nanolith. MEMS MOEMS, vol. 8, no. 2, 023010, May 2009. pdf

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  28. S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part I: concept and fabrication,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2017–2023, August 2007. pdf

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  29. S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part II: measurement and characterization,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2024–2030, August 2007. pdf

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  30. K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “Electronically temperature compensated silicon bulk acoustic resonator reference oscillator,” IEEE Journal of Solid State Circuits, vol. 42, no. 6, pp. 1425–1434, June 2007. pdf

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  31. S. Pourkamali and F. Ayazi, “Electrically coupled MEMS bandpass filters-Part II: without coupling element,” Sensors and Actuators A: Physical, vol. 122, no. 2, pp. 317–325, August 2005. pdf

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  32. S. Pourkamali and F. Ayazi, “Electrically coupled MEMS bandpass filters-Part I: with coupling element,” Journal of Sensors and Actuators A: Physical, vol. 122, no. 2, pp.307–316, August 2005. pdf

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  33. Z. Hao, S. Pourkamali and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part I: Design and Modeling,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1043–1053, December 2004. pdf

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  34. S. Pourkamali, Z. Hao and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part II: implementation and characterization,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1054–1062, December. 2004. pdf

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  35. S. Pourkamali, et al, “High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps,” Journal of Micro Electro Mechanical Systems, vol. 12, no. 4, pp. 487–496, August 2003. pdf

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