Journal Publications

Book Chapters

  1. O. Brand and S. Pourkamali, “Thermal Devices,” Resonant MEMS: Principles, Modeling,  Implementation and Applications Series “Advanced Micro & Nanosystems” (AMN) Wiley VCH, 2013, In Press.
  2. S. Pourkamali, “Thermally Actuated Resonators,” Encyclopedia of Nanotechnology, Springer-Verlag, pp. 2712–2723, 2012

Journal Publications

  1. V. Kumar, S. Sebdani, S. Pourkamali, “Sensitivity Enhancement of a Lorentz Force MEMS Magnetometer with Frequency Modulated Output”, Journal of Microelectromechanical Systems, Vol 26, Issue 4, pp 870-878, Aug 2017.

  2. E. Mehdizadeh, V. Kumar, J. Wilson, S. Pourkamali, “Inertial Impaction on MEMS Balance Chips for Real-Time Air Quality Monitoring”, IEEE Sensors Journal, Vol. 17, Issue 8, pp 2329-2337, April 2017.

  3. M. Maldonado -Garcia, V. Kumar, J.C. Wilson, and S. Pourkamali, “Chip-scale implementation and Cascade Assembly of particulate matter Collectors with embedded resonant mass balances”, Accepted for Publication, IEEE Sensors Journal, November 2016.

  4. V. Kumar, A. Ramezany, M. Mahdavi, S. Pourkamali, “Amplitude Modulated Lorentz Force MEMS Magnetometer with Pico-tesla sensitivity”, Journal of Micromechanics and Microengineering, Volume 26, Number 10, 105021, September 2016.

  5. M. Mahdavi, A. Abbasalipour, A. Ramezany and S. Pourkamali, “Micromachined Frequency-output Force Probes,” IEEE Sensor Journals,Volume 16, Issue 14, pp5520-5521, May 2016.

  6. V. Kumar, E. Mehdizadeh, S. Pourkamali, “Microelectromechanical Parallel Scanning Nanoprobes for Nanolithography”, IEEE Transactions on NanoTechnology, Vol 15, Issue 3, pp. 457-464.

  7. V. Kumar, R. Jafari, S. Pourkamali, “Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer”, Accepted for Publication, IEEE Sensors Journal, May 2016.

  8. Alireza Ramezany, Mohammad Mahdavi & Siavash Pourkamali, “Nanoelectromechanical resonant narrow-band amplifiers”, Microsystems & Nanoengineering 2, Article number: 16004 (2016).

  9. E. Mehdizadeh and S. Pourkamali, “Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips,” Micro & Nano Letters, Vol. 9, No. 10, pp. 673–675, 2014. pdf

  10. E. Mehdizadeh, M. Rostami, X. Guo, and S. Pourkamali, “Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid,” IEEE Electron Device Letters, Vol 35, No. 8, pp 874-876, August 2014. pdf

  11. E. Mehdizadeh, A. Rahafrooz, and S. Pourkamali, “Self-Controlled Fabrication of Single-Crystalline Silicon Nanobeams using Conventional Micromachining,” Nanotechnology 25, 315303, pp1-7, July 2014. pdf

  12. E. Mehdizadeh, J. C. Chapin, J. M. Gonzales, A. Rahafrooz, R. Abdolvand, By. W. Purse, and S. Pourkamali, “Microelectromechanical disk resonators for direct detection of liquid-phase analytes,” Sensors and Actuators A: Physical, vol. 216, pp. 136–141, September 2014. pdf

  13. E. Mehdizadeh, V. Kumar, and Siavash Pourkamali, “Sensitivity Enhancement of Lorentz Force MEMS Resonant Magnetometers via Internal Thermal-Piezoresistive Amplification,” IEEE Electron Device Letters, vol. 35, no. 2, pp. 268–270, February 2014. pdf

  14. X. Guo, Y. Yi, and S. Pourkamali, “A finite element analysis of thermoelastic damping in vented MEMS beam resonators,” International Journal of Mechanical Science, vol. 74, pp. 73–82, September 2013. pdf

  15. X. Guo, Y. Yi, and S. Pourkamali, “Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2863–2872, August 2013. pdf

  16. A. Hajjam, and S. Pourkamali, “Self-Contained Frequency Trimming of Micromachined Silicon Resonators via Localized Thermal Oxidation,” Journal of Microelectromechanical Systems, vol. 22, no. 5, pp. 1066–1072. October 2013. pdf

  17. H. Hall, A. Rahafrooz, J. Brown, V. Bright, and S. Pourkamali, “I-shaped thermally actuated VHF resonators with submicron components,” Sensors and Actuators A: Physical, vol. 195, pp. 160–166. June 2013. pdf

  18. A. Rahafrooz, and S. Pourkamali, “Thermal-piezoresistive energy pumps in micromechanical resonant structures,” IEEE Transactions on Electron Devices, vol. 59, no. 12, pp. 3587–3593, December 2012. pdf

  19. A. Hajjam, and S. Pourkamali, “Fabrication and characterization of high frequency MEMS-based resonant organic gas sensors,” IEEE Sensors Journal, vol. 12, no. 6, 2012, pp. 1958–1964, June 2012. pdf

  20. A. Hajjam, A. Logan, and S. Pourkamali, “Doping Induced Temperature compensation of thermally actuated micromechanical resonators via doping and bias current optimization,” IEEE Journal of Micro-Electro-Mechanical-Systems, vol. 21, no. 3, pp. 681–687, June 2012. pdf

  21. A. Hajjam, J. C. Wilson, and S. Pourkamali, “Individual air-borne particle mass measurement using high frequency micromechanical resonators,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2883–2890. November 2011 pdf

  22. A. Rahafrooz, and S. Pourkamali, “High frequency thermally actuated electromechanical resonators with piezoresistive readout,” IEEE Transactions on Electron Devices, vol. 58, no. 4, pp. 1205–1214, April 2011. pdf

  23. A. Hajjam, J. C. Wilson, A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part II: device fabrication and characterization,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125019, November 2010. pdf

  24. A. Rahafrooz, and S. Pourkamali, “Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing, part I: resonator design and modeling,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, 125018, November 2010. pdf

  25. G. K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, “Micromechanical IBARS: tunable high-Q resonators for temperature-compensated reference oscillators,” Journal of Micro-Electro-Mechanical-Systems, vol. 19, no. 3, pp. 503–515, June 2010. pdf

  26. A. Rahafrooz, and S. Pourkamali, “Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators,” Journal of Micromechanics and Microengineering, vol. 19, no. 11, 115003, September 2009. pdf

  27. Y. Yi, A. Rahafrooz, and S. Pourkamali, “Modeling and testing of the collective effects of thermoelastic and fluid damping on silicon MEMS resonators,” J. Micro/Nanolith. MEMS MOEMS, vol. 8, no. 2, 023010, May 2009. pdf

  28. S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part I: concept and fabrication,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2017–2023, August 2007. pdf

  29. S. Pourkamali, G. K. Ho and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, Part II: measurement and characterization,” IEEE Transactions on Electron Devices, vol. 54, no. 8, pp. 2024–2030, August 2007. pdf

  30. K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “Electronically temperature compensated silicon bulk acoustic resonator reference oscillator,” IEEE Journal of Solid State Circuits, vol. 42, no. 6, pp. 1425–1434, June 2007. pdf

  31. S. Pourkamali and F. Ayazi, “Electrically coupled MEMS bandpass filters-Part II: without coupling element,” Sensors and Actuators A: Physical, vol. 122, no. 2, pp. 317–325, August 2005. pdf

  32. S. Pourkamali and F. Ayazi, “Electrically coupled MEMS bandpass filters-Part I: with coupling element,” Journal of Sensors and Actuators A: Physical, vol. 122, no. 2, pp.307–316, August 2005. pdf

  33. Z. Hao, S. Pourkamali and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part I: Design and Modeling,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1043–1053, December 2004. pdf

  34. S. Pourkamali, Z. Hao and F. Ayazi, “VHF single crystal silicon side supported disk resonators-Part II: implementation and characterization,” Journal of Micro Electro Mechanical Systems, vol. 13, no. 6, pp. 1054–1062, December. 2004. pdf

  35. S. Pourkamali, et al, “High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100nm transduction gaps,” Journal of Micro Electro Mechanical Systems, vol. 12, no. 4, pp. 487–496, August 2003. pdf