Facilities

UTD Cleanroom Research Laboratory
The UTD Cleanroom Research Laboratory which is a class 10,000 cleanroom with 5,866 sq. ft. is located at the NSERL building. The Laboratory includes facilities for device fabrication and characterization with a range of equipment, such as plasma etch, PECVD, LPCVD, Metallization (sputter, e-gun, thermal evap) wet chemical stations, thermal (oxidation/diffusion, RTP) Lithography, and surface analysis tools. For a complete list of equipment please visit  Cleanroom Research Laboratory at University of Texas at Dallas.

TPT Manual Thermosonic Wire Bonder, Wedge & Ball HB05

TPT HB05 Manual Thermosonic Wire Bonder, Wedge & Ball Bonder

TPT HB05 Manual Thermosonic Wire Bonder, Wedge & Ball Bonder

TPT HB05 Manual Thermosonic Wire Bonder, Wedge & Ball Bonder

Agilent E5061A and E5061B Network Analyzers

Agilent E5061A and E5061B Network Analyzers

Tektronix DPO7254 Digital Phosphor Oscilloscope

Tektronix DPO7254 Digital Phosphor Oscilloscope

Agilent 53220A Universal Frequency Counter/Timer

Agilent 53220A Universal Frequency Counter/Timer

Agilent Power Supplies and Digital Multimeters

Agilent Power Supplies and Digital Multimeters

Ultrasonic Cleaner

Branson 1510 Ultrasonic Cleaner

Hakko FM 204 Soldering and Desoldering Station

Hakko FM 204 Soldering and Desoldering Station

VWR 7X7 Ceramic Hotplate 120V Pro

VWR 7X7 Ceramic Hotplate 120V Pro

ErgoOne Single Channel Pipettes (0.5-10 µl and 10-100 µl)

ErgoOne Single Channel Pipettes (0.5-10 µl and 10-100 µl)

Kurt J Lesker Box Vacuum Chamber

Kurt J Lesker Box Vacuum Chamber

Oerlikon Leybold Vacuum- TurboLab 80 Vacuum Pump

Oerlikon Leybold Vacuum- TurboLab 80 Vacuum Pump

33522B Waveform Generator, 30 MHz, 2-Channel

33522B Waveform Generator, 30 MHz, 2-Channel

Ametek DSP lock In Amplifier

Ametek DSP lock In Amplifier

Denver Instruments A-160 Electronic Analytical Balance
Fisher Hamilton Fume Hoods