E. Mehdizadeh and S. Pourkamali, “Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips,” Micro & Nano Letters, Vol. 9, No. 10, pp. 673–675, 2014. 
E. Mehdizadeh and S. Pourkamali, “Deep Submicron Parallel Scanning Probe Lithography using Two DOF MEMS Actuators with Integrated Nano-Tips,” Micro & Nano Letters, Vol. 9, No. 10, pp. 673–675, 2014.